タイプ
Three target magnetron sputtering coater with cleaning sample table
次元(L*W*H)
1100mm*900mm*1450mm
キーセールスポイント
Three head magnetron sputtering coater with cleaning sample table
Product name
Three-target magnetron sputtering coater
Keywords
Thee-target DC& 2RF magnetron sputtering coater
Cooling method
Water cooling air cooling
Cavity size
500mm X 490mmH